Monolithic integrated optoelectronic chip for vector force detection

Feng，Jiansong1; Wang，Zhongqi2; Zhanghu，Mengyuan1; Zhang，Xu1; Shen，Yong1; Yang，Jing1; Li，Zhibin1; Chen，Bin1; Wang，Taihong1; Chen，Xiaolong1; Liu，Zhaojun1

2024-12-01

10.1038/s41378-024-00712-6

Microsystems and Nanoengineering   影响因子和分区

2055-7434

Sensors with a small footprint and real-time detection capabilities are crucial in robotic surgery and smart wearable equipment. Reducing device footprint while maintaining its high performance is a major challenge and a significant limitation to their development. Here, we proposed a monolithic integrated micro-scale sensor, which can be used for vector force detection. This sensor combines an optical source, four photodetectors, and a hemispherical silicone elastomer component on the same sapphire-based AlGaInP wafer. The chip-scale optical coupling is achieved by employing the laser lift-off techniques and the flip-chip bonding to a processed sapphire substrate. This hemispherical structure device can detect normal and shear forces as low as 1 mN within a measurement range of 0–220 mN for normal force and 0–15 mN for shear force. After packaging, the sensor is capable of detecting forces over a broader range, with measurement capabilities extending up to 10 N for normal forces and 0.2 N for shear forces. It has an accuracy of detecting a minimum normal force of 25 mN and a minimum shear force of 20 mN. Furthermore, this sensor has been validated to have a compact footprint of approximately 1.5 mm, while maintaining high real-time response. We also demonstrate its promising potential by combining this sensor with fine surface texture perception in the fields of compact medical robot interaction and wearable devices. (Figure presented.).

英语

第一 ; 通讯

2-s2.0-85196660316

Scopus

1.Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen,518055,China
2.Department of Electrical and Electronic Engineering,The University of Hong Kong,Hong Kong

Feng，Jiansong,Wang，Zhongqi,Zhanghu，Mengyuan,et al. Monolithic integrated optoelectronic chip for vector force detection[J]. Microsystems and Nanoengineering,2024,10(1).

Feng，Jiansong.,Wang，Zhongqi.,Zhanghu，Mengyuan.,Zhang，Xu.,Shen，Yong.,...&Liu，Zhaojun.(2024).Monolithic integrated optoelectronic chip for vector force detection.Microsystems and Nanoengineering,10(1).

Feng，Jiansong,et al."Monolithic integrated optoelectronic chip for vector force detection".Microsystems and Nanoengineering 10.1(2024).