Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing

Gas sensors are widely applied in industrial production, environmental monitoring, food security, aerospace and biomedical treatment. With the development of the Internet of things, the demand for gas sensors in the consumer market is growing. In this work, a low-cost and high-performance microheater was designed and manufactured using the micro-electro-mechanical system (MEMS) process, and its application in gas sensors was studied. The design method and manufacturing process of the microheater were systematically studied, and a very simplified microheater manufacturing process was proposed for the first time and applied in practice. Then metal oxide semiconductor (MOS) gas sensors based on this microheater were manufactured. A high structure efficiency microheater-based catalytic combustion gas sensor was put forward and validated.

Through optimization of design structure and key processes, a microheater that only needed a two-step lithography process was successfully validated. Small-batch production was realized at the Micro & Nano Fabrication Center in SUSTech’s Core Research Facilities. This microheater had a power consumption of less than 40 mW at 400 ºC and displayed a homogeneous temperature in the heating zone. Based on an optimized packaging process, a packaged microheater was manufactured, and the reliability of the packaging was validated. The achievements in this work will underlie the application of this microheater in the field of gas sensors.

Commercially available tin oxide powders are used to prepare MEMS MOS gas sensor based on microheater developed in this work. The sensing performance towards gaseous ethanol was tested. The optimal working temperature was determined to be ~ 400 °C with a small power consumption of 39 mW. The maximum sensitivity to 10 ppm ethanol is 29.7, which exceeds that of commercial MEMS MOS sensors in the market.

Based on the above microheater design method and optimized process, a microheater for catalytic combustion gas sensors was designed and manufactured. With commercially available palladium doped alumina heterogeneous catalysts, catalytic combustion gas sensors were made and used to test for methane gas sensing. High-performance catalytic combustion gas sensors based on surface tension driven self-aligned double-side coating were manufactured for the first time. The sensitivity to methane gas is increased by 69.0 % compared to that of conventional single-side coated sensor.

The development and optimizations in this study pave a significant way towards advanced gas sensor applications based on MEMS microheater.

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