Uniformly distributed self-filling micro-strips for high-performance pressure-sensitive sensor

Chai, Zhiping1; Ke, Xingxing1; Chen, Han1; Zhu, Jiaqi1; Guo, Chuan Fei2; Wu, Zhigang1

10.1109/NEMS51815.2021.9451505

2021

16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)

2474-3747

2474-3755

978-1-6654-3008-1

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)

1390-1393

APR 25-29, 2021

null,Xiamen,PEOPLES R CHINA

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

Porous structure is one of widely utilized structures for flexible sensors. Researchers have endeavored for years to improve the performance of porous sensors. Apart from materials, the sensitivity of tactile sensors is heavily dependent on the microstructures of dielectric materials between the electrodes. Consequently, the study on structure of micropores becomes important. To obtain better sensitivity, we re-design the microstructure of porous elastomer with uniformly distributed self-filling micro-strips. And this design shows lower equivalent modulus, which is further verified by Finite Element Analysis (FEA). The fabricated sensor possesses a high sensitivity of 0.849 kPa(-1), and a low detection limit of 3 Pa. What's more, it also maintains a good stability after 1000 cyclic compression test. This sensor was demonstrated to be pragmatic enough in diverse practical scenarios, such as airflow detection and wrist pulse monitoring.

self-filling distribution Finite Element Analysis high sensitivity practical demonstrations

其他

英语

CPCI-S ; EI

National Natural Science Foundation of China[U1613204]

Engineering ; Science & Technology - Other Topics ; Materials Science

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:000693407600164

20213410817914

Compression testing ; Dielectric materials ; Microstructure

Dielectric Materials:708.1 ; Nanotechnology:761 ; Solid State Physics:933 ; Materials Science:951

Web of Science

1.Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan, Peoples R China
2.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen, Peoples R China

Chai, Zhiping,Ke, Xingxing,Chen, Han,et al. Uniformly distributed self-filling micro-strips for high-performance pressure-sensitive sensor[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2021:1390-1393.