Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide

Wu，Zhonghuai1; Zhang，Liangchi2,3

2021-11-10

10.1016/j.jmst.2021.02.028

JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY   影响因子和分区

1005-0302

The effect of amorphous film on the deformation mechanism and mechanical properties of 6H-SiC were systematically explored by a combination of both experiments and molecular dynamic (MD) simulations in nanoindentation. The experimental results showed that the plastic deformation of surface-modified 6H-SiC is mainly accommodated by dislocation activities in the subsurface and an amorphous layer with uniform thickness. The MD results indicated that the amorphous layer on the surface of the residual indentation mark consists of both amorphous SiO and SiC due to direct amorphization. In addition, the amorphous SiO film undergoes densification and then ruptures with the indentation depth increases. The modulus and hardness increase with increasing the indentation depth at the initial stage but will reach their stable values equivalent to monocrystalline 6H-SiC.

Amorphization Amorphous SiO2 film Dislocation evolution MD simulation Nanoindentation Surface-modified 6H-SiC

EI ; SCI

英语

通讯

WOS:000717475300007

20211910320028

Amorphous films ; Indentation ; Mechanical properties ; Molecular dynamics ; Silica ; Silicon oxides

Physical Chemistry:801.4 ; Chemical Products Generally:804 ; Inorganic Compounds:804.2 ; Amorphous Solids:933.2 ; Materials Science:951

MATERIALS SCIENCE

2-s2.0-85105260501

Scopus

1.Laboratory for Precision and Nano Processing Technologies,School of Mechanical and Manufacturing Engineering,University of New South Wales,NSW 2052,Australia
2.Shenzhen Key Laboratory of Cross-Scale Manufacturing Mechanics,Southern University of Science and Technology,Shenzhen,518055,China
3.Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,518055,China

Wu，Zhonghuai,Zhang，Liangchi. Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2021,90:58-65.

Wu，Zhonghuai,&Zhang，Liangchi.(2021).Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,90,58-65.

Wu，Zhonghuai,et al."Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 90(2021):58-65.